Dimensions	1400x700x1300 (height)  mm
Weight	no more 150 kg
Power feeding	220 V (120V – optionally) 50 – 60 Hz
Power assumption	410 W
High voltage power	50 W
X-ray tube	BSW36 – Cu ( Fe, Cr )
Tube cooling	forced air
High voltage	15 – 40 kV
X-ray tube current	1.25 mA
Radiation protection	Steel, Plexiglas
Diffraction angles range	10 - 86°
Monochromators	Ge or Si
Sample diameter	50 - 101mm
Sample height	0.3 - 100 mm
Misorientation range	10°
Measurement error	± 2´
Scintillation detector	entrance window diameter 20 mm, count rate up to 6*105 cps
Measurement cycle duration	3 – 6 min.
Software	Radicon Device Programming Workbench (RDPW)

Diffractometer arrangement and operation

X-ray optic diagram is presented in Fig. 2. Scintillation detector with aperture  ±10°  is set in a position J (Theta) for the selected reflection. A tube with monochromator rotates about a position Theta±alpha (alpha - asymmetry angle). The diffractometer allows a using both symmetric and asymmetric reflections. Asymmetric reflections are needed in the cases when a cut plane is inclined significantly from any crystallographic planes, which give strong reflections. A wafer is set vertically for a primary flat measurement by means of a special attachment.

A common view of a 3- circle goniometer is represented in Fig. 3. A tube BSW36 housing and the monochromator block combine into an X-ray block, which is mounted on a carriage of Theta – goniometer. It's angle range is from 10 to 46°. Two crystal-monochromators can be changed automatically. They give two beams spaced by an angle 30°.  This angle, adding to a carriage angle range, provides the Bragg angle range from 10 to 86°.

Scintillation detector is mounted on a 2Theta – goniometer carriage. It's angle range is -10...-86°. So the 2Theta working range is 172° for the symmetric reflections.

j -goniometer is mounted in an upper part of a common frame and provides a 360^о rotation around a vertical axis. All three goniometers have angle encoders.

A sample should be set on a special platform of Phi -goniometer. It's surface coincides with the axes of Theta- and 2Theta – goniometers. A definite sample surface orientation is provided by three steel ball supports. This plane is calibrated in reference to the axis of Phi -goniometer during a manufacturing. Orientation flat should be jammed to a special toothed jamb.

Special software provides the diffractometer control, data acquisition, reflection profile analysis, final result output on a monitor and in a file. The results can be printed if needed.  USB or Ethernet channel is used for the diffractometer control via a control block with corresponding devices modules ( stepping motors, scintillation detector and others).

Fig. 2. X-ray optical diagram of  the diffractometer DSO-2P. M1, M2 – monochromators

Fig.3. Three-circle goniometer.