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X-ray diffractometer DSO-2V2M for crystal orientation measurementAutomatic 3-circle X-ray diffractometer DSO-2V2 is intended for the orientation measurement of big crystals and wafers, including the searching of a primary flat direction. The mehod of measurement is based on the analysis of a diffraction diagram observed at the rotation of X-ray source around the Bragg axis, which lies in a plane of crystal surface.
Fig.1. General view of DSO-2V2M. Specification
Optical diagram and arrangement Crystal orientation measurement is realized by the X-ray diffraction method. The optical diagram is presented in fig.2. Scintillation detector with aperture ±9° moves to a Theta position for the selected reflection, and the X-ray source monoblock XRB scans the angle range close to Theta. Diffractometer allows the using both symmetric and asymmetric reflections. The using of asymmetric reflections is needed in a case of primary flat search on crystals with a not cubic lattice. Ñylindrical ingot is mounted horizontally on the rollers with a manually rotating drive, if a determining of primary flat direction is needed. The general view of a three circle goniometer is represented in fig.3. Goniometer is mounted inside of a diffractometer sceleton under platform with a base table. The control block of diffractometer should be placed on a separate table in a couple with a personal computer. Diffractometer is controlled via the Ethernet channel.
Fig.2. X-ray optic diagram of DSO-2V2M.
Fig.3. Three-circle goniometer. 1 - X-ray source monoblock, 2 – scintillation counter, 3 – collimator, 4 – two shutters mechanizm, 5 – arc slides, 6 – sine drive, 7- infrared presence sensor, 8 – turning slit, 9 - radiator, 10 - adjusting carriage.
Fig.4. Sample mounting platform.
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