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X-ray diffractometer DSO-2V2M for crystal orientation measurement

            Automatic 3-circle X-ray diffractometer DSO-2V2 is intended for the orientation measurement of big crystals and wafers, including the searching of a primary flat direction. The mehod of measurement is based on the analysis of a diffraction diagram observed at the rotation of X-ray source around the Bragg axis, which lies in a plane of crystal surface.

Fig.1. General view of DSO-2V2M.

Specification

Dimensions

1563õ898õ1396 (height)  mm

Weight

< 440 êã

Power feeding

220 V 50 – 60 Hz

Power consumption

200 W, (computer does not include)

X-ray generator power

10 W

X-ray tube

0.01BS18 – Cu ( Fe, Cr )

X-ray tube cooling

forced air

High voltage

15 – 25 kV

X-ray tube current

0.4 mA

Biological protection

Aluminum, steel, plexiglass 10 mm

Diffraction angle range

24.5 – 84.5°  - X-ray source (direct beam)

46.67 – 106.67°  - X-ray source (monochromatic beam)

30 - 90°  - detector

Phi-goniometer angle range

-5...270°, one step = 0.005°, angle encoder increment = 0.001°

Sample diameter

12 - 500 mm

Sample height

0.2 - 400 mm

Inclination range

8°

Measurement error

± 1´

Primary flat measurement error

± 30´

Scintillation counter

entrance window diameter 24 mm, count rate 6*105 cps

Measurement cycle duration

40 sec. – 2 min.

Software

Radicon Device Programming Workbench (RDPW)

Radiation protection

less than 1 mSv/h (diffractometer  is fully exempted from radiation inspection and registration)

Optical diagram and arrangement

        Crystal orientation measurement is realized by the X-ray diffraction method. The optical diagram is presented in fig.2. Scintillation detector with aperture ±9° moves to a Theta position for the selected reflection, and the X-ray source monoblock XRB scans the angle range close to Theta. Diffractometer allows the using both symmetric and asymmetric reflections. The using of asymmetric reflections is needed in a case of primary flat search on crystals with a not cubic lattice. Ñylindrical ingot is mounted horizontally on the rollers with a manually rotating drive, if a determining of primary flat direction is needed.

The general view of a three circle goniometer is represented in fig.3. Goniometer is mounted inside of a diffractometer sceleton under platform with a base table.

The control block of diffractometer should be placed on a separate table in a couple with a personal computer. Diffractometer is controlled via the Ethernet channel.

Fig.2. X-ray optic diagram of DSO-2V2M.

Fig.3. Three-circle goniometer.

1 - X-ray source monoblock, 2 – scintillation counter, 3 – collimator, 4 – two shutters mechanizm, 5 – arc slides, 6 – sine drive, 7- infrared presence sensor, 8 – turning slit, 9 - radiator, 10 - adjusting carriage.

Fig.4. Sample mounting platform.

 

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