PDP-1 Attachment

Scientific Instruments

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PDP-1 Attachment for a Double-Crystal Diffraction Mapping of Wafers

PDP-1, double-crystal 5-axes attachment (fig.1) to the X-ray diffractometer DRON-3 (4, 6, UM1) is intended for the automatic mapping of wafers by diffraction parameters of rocking curves from different points of a sample surface. PDP-1 includes a modifying of goniometer GUR-8 or GUR-9 (two stepping motors, two angle encoder and a new gear box), new X-ray tube stage, new collimator (monochromator) stage, original scintillation detector on a new detector lever, special control block and original software.

Fig.1. General view of PDP-1 on the diffractometer DRON-3.

Specification

Dimendions ( assembly with an X-ray tube on a base platform)	1110x845x813(height) mm
Power feeding	220 V 50 – 60 Hz
Power consumption of a control block	<170 W (computer is not included)
X-ray tube	1.2BSW29 – Cu
X-ray tube cooling	city water or a closed chiller refrigirating system
Angle ranges and linear stages strokes: - 2Theta_D (detector axis) - Theta_T (sample axis) - Phi – goniometer - Х – stage, mm - Z – stage, mm - Y – stage, mm - Chi – tilt stage	–5° … 140° –1.5° … 185° –95° … +95° –100…+100 –100…+100 –5 … +5 –10° … +10°
Parameters of the automatic goniometers and stages: - indepentent motorized axes of the goniometer GUR-8(9) - minimal (half) step of Theta axis, deg. - minimal (half) step of 2Theta axis, deg. - maximum motor speed on Theta and 2Theta axes, half-step/sec - minimal (half) step of Х stage, mm - minimal (half) step of Z stage, мм - minimal (half) step of Y stage, мм - minimal (half) step of Phi-goniometer, deg. - minimal (half) step of Chi-tilt stage, deg.	present 0.00025 0.0005 10000 0.0025 0.0025 0.0025 0.005 ~0.0021
Angle encoder increment on the worm axes (devided to Theta and 2Theta axes), deg.	0.0005
Detector intensity range, cps	1-600000
Exposition in a pulse count detector mode, sec.	0.1 - 500
Wafer diameter, mm	30 - 200
Wafer thickness, mm	0.2 - 1.5
Wafer inclination (corresponding to detector apperture)	1.5°
Entrance window diameter of the scintillation detector, mm	24
Minimal "sample - detector" distance, mm	136
Software	Radicon Device Programming Workbench (RDPW)

Arrangement and operation of PDP-1

The PDP-1 attachment transformes a general purpose diffractometer DRON with an X-ray goniometer GUR-8(9) to the automatic high resolution diffractometer, which provides the rocking curves scanning, including automatic mapping of wafers with a diameter up to 8" (200 mm). Special program shifts a sample from one point to another by a calculated map, acquires diffraction data, processes rocking curves, outputs them in a graphic window, and records to the corresponding files full information about a measurement cicle.

X-ray optical diagram of a diffractometer with the PDP-1 attachment is presented in fig.2, and a 3D-model - in fig.3.

The control block in a standard rack 19" 6U, and a computer, should be mounted on a separate table. USB or Ethernet channel is used for the attachment control.

PDP-1 attachment was tested on a DRON-3 diffractometer for the mapping of "silicon-on-sapphire" structures. The PDP-1 attachment and its software can be customized to different diffractometers and materials.

Fig.2. X-ray optical diagram of a diffractometer with PDP-1 attachment.

Рис.3. 3D-model of the PDP-1 attachment to diffractometer with a goniometer GUR-8(9).

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